Coincidence Detection of EELS and EDX Spectral Events in the Electron Microscope

Recent advances in the development of electron and X-ray detectors have opened up possibility to detect single events from which its time arrival can be determined with nanosecond resolution. This allows observing correlations between electrons X-rays transmission microscope. In this work, a novel setup is described measures individual using silicon drift detector digital pulse processor for Timepix3 electrons. enables recording correlation both event streams while at same preserving complete conventional energy loss (EELS) dispersive (EDX) signal. We show that added coincidence information improves sensitivity detecting trace elements matrix as compared EELS EDX. Furthermore, method determination collection efficiencies without use reference sample subtract background signal EDX any prior knowledge shape pre-edge fitting region. discuss limitations resolution arising due specificities ways further improve aspect.